系统参数 及测量精度 |
EFL | MTF | BFL | 曲率半径 | 中心偏差 |
被测样品直径 | 3~75mm | ||||
有效通光孔径 | 50mm | ||||
测量范围 | +5~+2000mm -5~-1500mm |
5~100mm EFL |
5~700mm | 5~700mm | +5~+750mm -5~-750mm |
测量精度 | 2~25mm:0.1~0.3% 25~500mm:0.03~0.1% 500~2000mm:0.05~0.3% |
0.02 | 0.05~0.3% | 0.05~0.3% | ±2″或0.2μm |
重复精度 | 0.03~0.2% | 0.01 | 0.03~0.2% | 0.03~0.2% | ±2″或0.2μm |